7

Some effects at ion beam modification of polymethyl methacrylate

Year:
1984
Language:
english
File:
PDF, 349 KB
english, 1984
8

General problems of high resolution lithography

Year:
1986
Language:
english
File:
PDF, 565 KB
english, 1986
11

EBT-2003

Year:
2005
Language:
english
File:
PDF, 135 KB
english, 2005